microlithography

English

Etymology

Etymology tree
Proto-Indo-European *mey-der.?
Ancient Greek μῑκρός (mīkrós)
Ancient Greek μῑκρο- (mīkro-)lbor.
English micro-
English lithography
English microlithography

    From micro- + lithography.

    Pronunciation

    • Rhymes: -ɒɡɹəfi

    Noun

    microlithography (uncountable)

    1. Any of several techniques for the production of microscale devices; especially the production of semiconductor devices using beams of photons or electrons.
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